|
Spindle sealing |
Bellows |
|
|
Leak rates |
Body |
1 x 10-9 mbar.l/s |
|
Seat |
1 x 10-9 mbar.l/s |
|
|
Surface Treatment |
Electrolytic polishing |
|
|
Bakeable Temperature |
Body |
<90℃ |
|
Drive member |
<60℃ |
|
|
Differential pressure on the gate(Note*) |
Positive pressure difference |
≦ 120KPa |
|
Reverse pressure difference |
≦ 100KPa | |
|
Differential pressure at opening(Note*) |
< 10 mbar(0.01bar) |
|
|
Pressure Range |
1* 10-8 mbar to 1.0 bar |
|
|
Drive mode |
Pneumatic 5~7 Kg/cm² |
|
|
Compressed air connection |
Φ6 mm |
|
|
Standard Seal |
Gate |
Viton® O'ring |
|
Open/Close sensor |
DC4-24(V) or AC4-240(V), 5-40 ma |
|
|
Solenoid Power |
DC24(V) ,AC24(V),AC110(V),AC220(V) |
|
|
Mounting position |
Actuator up or down |
|
